Person | TU Delft Repository

AL

A Leeuwestein

3 records found

1

Authored

Aerial image based lens metrology for wafer steppers.

Journal article (2006) - P. Dirksen, J.J.M. Braat, AJEM Janssen, A Leeuwestein, T Matsuyama, T Noda

Determination of resist parameters using the extended Nijboer-Zernike theory.

Journal article (2004) - P. Dirksen, J.J.M. Braat, AJEM Janssen, A Leeuwestein, H Kwinten, D van Steenwinckel

Experimental determination of lens abberations from the intensity pointspread function in the focal region

Journal article (2003) - P. Dirksen, J.J.M. Braat, C. Juffermans, A Leeuwestein