Person | TU Delft Repository

TM

T Matsuyama

4 records found

1

Authored

Aerial image based lens metrology for wafer steppers.

Journal article (2006) - P. Dirksen, J.J.M. Braat, AJEM Janssen, A Leeuwestein, T Matsuyama, T Noda

Impact charging experiments with single particles of hunderd micrometre size

Journal article (2003) - T Matsuyama, M Ogu, H Yamamoto, J.C.M. Marijnissen, B Scarlett

Transformation of Diffraction Pattern due to Ellipsoids into Equivalent Diameter Distribution for Spheres.

Journal article (2000) - T Matsuyama, H Yamamoto, B Scarlett

A new apparatus for impactcharging experiments using an aerosol beam generator

Journal article (1999) - T Matsuyama, J.C.M. Marijnissen, H Yamamoto, B Scarlett