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TM
T Matsuyama
Academic Work (4)
Journal article (4)
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4 records found
1
Aerial image based lens metrology for wafer steppers.
Journal article (2006) -
P. Dirksen (author)
,
J.J.M. Braat (author)
,
AJEM Janssen (author)
,
A Leeuwestein (author)
,
T Matsuyama (author)
,
T Noda (author)
Impact charging experiments with single particles of hunderd micrometre size
Journal article (2003) -
T Matsuyama (author)
,
M Ogu (author)
,
H Yamamoto (author)
,
J.C.M. Marijnissen (author)
,
B Scarlett (author)
Transformation of Diffraction Pattern due to Ellipsoids into Equivalent Diameter Distribution for Spheres.
Journal article (2000) -
T Matsuyama (author)
,
H Yamamoto (author)
,
B Scarlett (author)
A new apparatus for impactcharging experiments using an aerosol beam generator
Journal article (1999) -
T Matsuyama (author)
,
J.C.M. Marijnissen (author)
,
H Yamamoto (author)
,
B Scarlett (author)
