P. Dirksen | TU Delft Repository

PD

P. Dirksen

Book chapter (2)

Conference paper (4)

Journal article (18)

Poster (1)

25 records found

1

Assessment of optical systems by means of point-spread functions.

Book chapter (2008) - J.J.M. Braat (author), JJM Braat (author), S. van Haver (author), S van Haver (author), AJEM Janssen (author), P. Dirksen (author)

Analytic expressions and approximations for the on-axis, aberration-free Rayleigh and Debye intergral in the case of focusing fields on a circular aperture.

Journal article (2008) - RM Aarts (author), J.J.M. Braat (author), JJM Braat (author), P. Dirksen (author), S van Haver (author), S. van Haver (author), F. van Heesch (author), AJEM Janssen (author)

Zernike representation and Strehl ratio op optical systems with variable numerical aperture.

Journal article (2008) - AJEM Janssen (author), S. van Haver (author), S van Haver (author), P. Dirksen (author), J.J.M. Braat (author), JJM Braat (author)

Extended Nijboer-Zernike (ENZ) based evaluation of amplitude and phase aberrations on scaled and annual pupils.

Conference paper (2007) - S. van Haver (author), S van Haver (author), AJEM Janssen (author), P. Dirksen (author), J.J.M. Braat (author), JJM Braat (author)

High-NA aberration retrieval with extended Nijboer-Zernike vector diffraction theory: Erratum

Journal article (2007) - S. van Haver (author), S van Haver (author), J.J.M. Braat (author), JJM Braat (author), P. Dirksen (author), AJEM Janssen (author)

Energy and angular momentum flux in a high-numerical-aperture imaging system using the extended Nijboer-Zernike theory.

Journal article (2007) - S. van Haver (author), S van Haver (author), J.J.M. Braat (author), JJM Braat (author), A.J.E.M. Jansen (author), P. Dirksen (author)

Strehl ratio and optimum focus of high-numerical-aperture beams.

Journal article (2007) - AJEM Janssen (author), S. van Haver (author), S van Haver (author), J.J.M. Braat (author), JJM Braat (author), P. Dirksen (author)

Estimating resist parameters in optical lithograpgy using the extended Nijboer-Zernike theory

Journal article (2006) - P. Dirksen (author), J.J.M. Braat (author), JJM Braat (author), AJEM Janssen (author)

High-NA aberration retrieval with the extended Nijboer-Zernike vector diffraction theory.

Journal article (2006) - S. van Haver (author), S van Haver (author), J.J.M. Braat (author), JJM Braat (author), P. Dirksen (author), AJEM Janssen (author)

High-NA lens characterization by through-focus intensity measurement

Conference paper (2006) - S. van Haver (author), S van Haver (author), J.J.M. Braat (author), JJM Braat (author), P. Dirksen (author), AJEM Janssen (author)

Aerial image based lens metrology for wafer steppers.

Journal article (2006) - P. Dirksen (author), JJM Braat (author), J.J.M. Braat (author), AJEM Janssen (author), A Leeuwestein (author), T Matsuyama (author), T Noda (author)

Abberation retrieval from the intensity points-spread function in the focal region using the extended

Journal article (2005) - C van der Avoort (author), JJM Braat (author), J.J.M. Braat (author), P. Dirksen (author), AJEM Janssen (author)

Extended Nijboer-Zernike approach to aberration and birefringence retrieval in a high-numerical-aperture optical system

Journal article (2005) - J.J.M. Braat (author), JJM Braat (author), P. Dirksen (author), AJEM Janssen (author), AS van de Nes (author), A.S. van de Nes (author), S van Haver (author), S. van Haver (author)

Through-Focus Point-Spread Function Evaluation fro Lens Metrology using the extended Nijboer-Zernike Theory

Conference paper (2005) - J.J.M. Braat (author), JJM Braat (author), P. Dirksen (author), AJEM Janssen (author)

Polarisation-aberration retrieval for high-NA systems using the extended Nijboer-Zernike diffraction theory.

Poster (2005) - J.J.M. Braat (author), JJM Braat (author), P. Dirksen (author), AJEM Janssen (author), A.S. van de Nes (author), AS van de Nes (author)

Influence of mask induced polarization effects on a pattern printability

Journal article (2005) - Y Aksenov (author), P. Dirksen (author), X Wei (author), P Zandbergen (author)

Aberration retrieval for high-NA optical systems using the extended Nijboer-Zernike theory

Journal article (2005) - P. Dirksen (author), J.J.M. Braat (author), JJM Braat (author), AJEM Janssen (author), A Leeuwenstein (author)

On the computation of the Nijboer-Zernike aberration intergrals at arbitrary defocus

Journal article (2004) - AJEM Janssen (author), J.J.M. Braat (author), JJM Braat (author), P. Dirksen (author)

Determination of resist parameters using the extended Nijboer-Zernike theory.

Journal article (2004) - P. Dirksen (author), J.J.M. Braat (author), JJM Braat (author), AJEM Janssen (author), A Leeuwestein (author), H Kwinten (author), D van Steenwinckel (author)

Diffractive Read-Out of Optical Discs

Book chapter (2003) - J.J.M. Braat (author), JJM Braat (author), P. Dirksen (author), AJEM Janssen (author), A.S. van de Nes (author), AS van de Nes (author)