P. Dirksen | TU Delft Repository

PD

P. Dirksen

Book chapter (2)

Conference paper (4)

Journal article (18)

Poster (1)

25 records found

1

Assessment of optical systems by means of point-spread functions.

Book chapter (2008) - J.J.M. Braat (author), S. van Haver (author), AJEM Janssen (author), P. Dirksen (author)

Analytic expressions and approximations for the on-axis, aberration-free Rayleigh and Debye intergral in the case of focusing fields on a circular aperture.

Journal article (2008) - RM Aarts (author), J.J.M. Braat (author), P. Dirksen (author), S. van Haver (author), F. van Heesch (author), AJEM Janssen (author)

Zernike representation and Strehl ratio op optical systems with variable numerical aperture.

Journal article (2008) - AJEM Janssen (author), S. van Haver (author), P. Dirksen (author), J.J.M. Braat (author)

Extended Nijboer-Zernike (ENZ) based evaluation of amplitude and phase aberrations on scaled and annual pupils.

Conference paper (2007) - S. van Haver (author), AJEM Janssen (author), P. Dirksen (author), J.J.M. Braat (author)

High-NA aberration retrieval with extended Nijboer-Zernike vector diffraction theory: Erratum

Journal article (2007) - S. van Haver (author), J.J.M. Braat (author), P. Dirksen (author), AJEM Janssen (author)

Energy and angular momentum flux in a high-numerical-aperture imaging system using the extended Nijboer-Zernike theory.

Journal article (2007) - S. van Haver (author), J.J.M. Braat (author), A.J.E.M. Jansen (author), P. Dirksen (author)

Strehl ratio and optimum focus of high-numerical-aperture beams.

Journal article (2007) - AJEM Janssen (author), S. van Haver (author), J.J.M. Braat (author), P. Dirksen (author)

Aerial image based lens metrology for wafer steppers.

Journal article (2006) - P. Dirksen (author), J.J.M. Braat (author), AJEM Janssen (author), A Leeuwestein (author), T Matsuyama (author), T Noda (author)

High-NA aberration retrieval with the extended Nijboer-Zernike vector diffraction theory.

Journal article (2006) - S. van Haver (author), J.J.M. Braat (author), P. Dirksen (author), AJEM Janssen (author)

Estimating resist parameters in optical lithograpgy using the extended Nijboer-Zernike theory

Journal article (2006) - P. Dirksen (author), J.J.M. Braat (author), AJEM Janssen (author)

High-NA lens characterization by through-focus intensity measurement

Conference paper (2006) - S. van Haver (author), J.J.M. Braat (author), P. Dirksen (author), AJEM Janssen (author)

Through-Focus Point-Spread Function Evaluation fro Lens Metrology using the extended Nijboer-Zernike Theory

Conference paper (2005) - J.J.M. Braat (author), P. Dirksen (author), AJEM Janssen (author)

Abberation retrieval from the intensity points-spread function in the focal region using the extended

Journal article (2005) - C van der Avoort (author), J.J.M. Braat (author), P. Dirksen (author), AJEM Janssen (author)

Extended Nijboer-Zernike approach to aberration and birefringence retrieval in a high-numerical-aperture optical system

Journal article (2005) - J.J.M. Braat (author), P. Dirksen (author), AJEM Janssen (author), A.S. van de Nes (author), S. van Haver (author)

Aberration retrieval for high-NA optical systems using the extended Nijboer-Zernike theory

Journal article (2005) - P. Dirksen (author), J.J.M. Braat (author), AJEM Janssen (author), A Leeuwenstein (author)

Influence of mask induced polarization effects on a pattern printability

Journal article (2005) - Y Aksenov (author), P. Dirksen (author), X Wei (author), P Zandbergen (author)

Polarisation-aberration retrieval for high-NA systems using the extended Nijboer-Zernike diffraction theory.

Poster (2005) - J.J.M. Braat (author), P. Dirksen (author), AJEM Janssen (author), A.S. van de Nes (author)

Determination of resist parameters using the extended Nijboer-Zernike theory.

Journal article (2004) - P. Dirksen (author), J.J.M. Braat (author), AJEM Janssen (author), A Leeuwestein (author), H Kwinten (author), D van Steenwinckel (author)

On the computation of the Nijboer-Zernike aberration intergrals at arbitrary defocus

Journal article (2004) - AJEM Janssen (author), J.J.M. Braat (author), P. Dirksen (author)

Aberration retrieval using the extended Nijboer-Zernike approach

Journal article (2003) - P. Dirksen (author), J.J.M. Braat (author), AJEM Janssen (author), C. Juffermans (author)