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Extended Nijboer-Zernike (ENZ) based evaluation of amplitude and phase aberrations on scaled and annual pupils.

Conference paper (2007) - S. van Haver, AJEM Janssen, P. Dirksen, J.J.M. Braat

High-NA aberration retrieval with extended Nijboer-Zernike vector diffraction theory: Erratum

Journal article (2007) - S. van Haver, J.J.M. Braat, P. Dirksen, AJEM Janssen

Aerial image based lens metrology for wafer steppers.

Journal article (2006) - P. Dirksen, J.J.M. Braat, AJEM Janssen, A Leeuwestein, T Matsuyama, T Noda

Estimating resist parameters in optical lithograpgy using the extended Nijboer-Zernike theory

Journal article (2006) - P. Dirksen, J.J.M. Braat, AJEM Janssen

High-NA aberration retrieval with the extended Nijboer-Zernike vector diffraction theory.

Journal article (2006) - S. van Haver, J.J.M. Braat, P. Dirksen, AJEM Janssen

High-NA lens characterization by through-focus intensity measurement

Conference paper (2006) - S. van Haver, J.J.M. Braat, P. Dirksen, AJEM Janssen

Through-Focus Point-Spread Function Evaluation fro Lens Metrology using the extended Nijboer-Zernike Theory

Conference paper (2005) - J.J.M. Braat, P. Dirksen, AJEM Janssen

Influence of mask induced polarization effects on a pattern printability

Journal article (2005) - Y Aksenov, P. Dirksen, X Wei, P Zandbergen

Extended Nijboer-Zernike approach to aberration and birefringence retrieval in a high-numerical-aperture optical system

Journal article (2005) - J.J.M. Braat, P. Dirksen, AJEM Janssen, A.S. van de Nes, S. van Haver

Aberration retrieval for high-NA optical systems using the extended Nijboer-Zernike theory

Journal article (2005) - P. Dirksen, J.J.M. Braat, AJEM Janssen, A Leeuwenstein

Polarisation-aberration retrieval for high-NA systems using the extended Nijboer-Zernike diffraction theory.

Poster (2005) - J.J.M. Braat, P. Dirksen, AJEM Janssen, A.S. van de Nes

Abberation retrieval from the intensity points-spread function in the focal region using the extended

Journal article (2005) - C van der Avoort, J.J.M. Braat, P. Dirksen, AJEM Janssen

On the computation of the Nijboer-Zernike aberration intergrals at arbitrary defocus

Journal article (2004) - AJEM Janssen, J.J.M. Braat, P. Dirksen

Determination of resist parameters using the extended Nijboer-Zernike theory.

Journal article (2004) - P. Dirksen, J.J.M. Braat, AJEM Janssen, A Leeuwestein, H Kwinten, D van Steenwinckel

Experimental determination of lens abberations from the intensity pointspread function in the focal region

Journal article (2003) - P. Dirksen, J.J.M. Braat, C. Juffermans, A Leeuwestein

Extended Nijboer-Zernike representation of the field in the focal region of an aberrated high-aperture optical system

Journal article (2003) - J.J.M. Braat, P. Dirksen, AJEM Janssen, A.S. van de Nes

Diffractive Read-Out of Optical Discs

Book chapter (2003) - J.J.M. Braat, P. Dirksen, AJEM Janssen, A.S. van de Nes

Aberration retrieval using the extended Nijboer-Zernike approach

Journal article (2003) - P. Dirksen, J.J.M. Braat, AJEM Janssen, C. Juffermans

Assessment of an extended Nijboer-Zernike approach for the computation of optical point-spread functions

Journal article (2002) - J.J.M. Braat, P. Dirksen, A.J.E.M. Jansen

Observations on the Optical Point Spread Function of a Lithographic Projection Lens

Conference paper (2002) - P. Dirksen, J.J.M. Braat, P. de Bisschop, A Janssen, C. Juffermans, A. Williams

P. Dirksen

Authored