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D van Steenwinckel
Academic Work (1)
Journal article (1)
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Determination of resist parameters using the extended Nijboer-Zernike theory.
Journal article (2004) -
P. Dirksen (author)
,
J.J.M. Braat (author)
,
AJEM Janssen (author)
,
A Leeuwestein (author)
,
H Kwinten (author)
,
D van Steenwinckel (author)
