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H Kwinten
1 records found
1
Authored
Determination of resist parameters using the extended Nijboer-Zernike theory.
Journal article (2004) -
P. Dirksen
,
J.J.M. Braat
,
AJEM Janssen
,
A Leeuwestein
,
H Kwinten
,
D van Steenwinckel
