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YA
Y Aksenov
2 records found
1
Authored
Three-dimensional rigorous simulation of mask induced polarization
Journal article (2005) -
X Wei
,
Paul Urbach
,
Y Aksenov
,
AJH Wachters
Influence of mask induced polarization effects on a pattern printability
Journal article (2005) -
Y Aksenov
,
P. Dirksen
,
X Wei
,
P Zandbergen