Y Aksenov | TU Delft Repository

YA

Y Aksenov

Journal article (2)

2 records found

1

Three-dimensional rigorous simulation of mask induced polarization

Journal article (2005) - X Wei (author) , H. Urbach (author) , Y Aksenov (author) , AJH Wachters (author)

Influence of mask induced polarization effects on a pattern printability

Journal article (2005) - Y Aksenov (author) , P. Dirksen (author) , X Wei (author) , P Zandbergen (author)