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YA
Y Aksenov
Academic Work (2)
Journal article (2)
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2 records found
1
Three-dimensional rigorous simulation of mask induced polarization
Journal article (2005) -
X Wei (author)
,
Paul Urbach (author)
,
Y Aksenov (author)
,
AJH Wachters (author)
Influence of mask induced polarization effects on a pattern printability
Journal article (2005) -
Y Aksenov (author)
,
P. Dirksen (author)
,
X Wei (author)
,
P Zandbergen (author)
