Three-dimensional rigorous simulation of mask induced polarization

Wei, X; Urbach, H.; Aksenov, Y; Wachters, AJH

Three-dimensional rigorous simulation of mask induced polarization

Journal article (2005)

Authors

X Wei ImPhys/Optics

H. Urbach ImPhys/Optics

Y Aksenov External organisation

AJH Wachters External organisation

Research Group

ImPhys/Optics

To reference this document use:

http://resolver.tudelft.nl/uuid:908bfc49-5fcc-4e5f-96d2-cfbe96ab4909

More Info

expand_more

Published Date

2005

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

ImPhys/Optics

No files available

Metadata only record. There are no files for this journal article.