A Leeuwestein | TU Delft Repository

AL

A Leeuwestein

Journal article (3)

3 records found

1

Aerial image based lens metrology for wafer steppers.

Journal article (2006) - P. Dirksen (author), J.J.M. Braat (author), AJEM Janssen (author), A Leeuwestein (author), T Matsuyama (author), T Noda (author)

Determination of resist parameters using the extended Nijboer-Zernike theory.

Journal article (2004) - P. Dirksen (author), J.J.M. Braat (author), AJEM Janssen (author), A Leeuwestein (author), H Kwinten (author), D van Steenwinckel (author)

Experimental determination of lens abberations from the intensity pointspread function in the focal region

Journal article (2003) - P. Dirksen (author), J.J.M. Braat (author), C. Juffermans (author), A Leeuwestein (author)