The unique properties of two-dimensional (2D) materials bring great promise to improve sensor performance and realise novel sensing principles. However, to enable their high-volume production, wafer-scale processes that allow integration with electronic readout circuits need to be developed. In this perspective, we review recent progress in on-chip 2D material sensors, and compare their performance to the state-of-the-art, with a focus on results achieved in the Graphene Flagship programme. We discuss transfer-based and transfer-free production flows and routes for complementary metal-oxide-semiconductor integration and prototype development. Finally, we give an outlook on the future of 2D material sensors, and sketch a roadmap towards realising their industrial and societal impact.@en

The high susceptibility of ultrathin two-dimensional (2D) material resonators to force and temperature makes them ideal systems for sensing applications and exploring thermomechanical coupling. Although the dynamics of these systems at high stress has been thoroughly investigated, their behavior near the buckling transition has received less attention. Here, we demonstrate that the force sensitivity and frequency tunability of 2D material resonators are significantly enhanced near the buckling bifurcation. This bifurcation is triggered by compressive displacement that we induce via thermal expansion of the devices, while measuring their dynamics via an optomechanical technique. We understand the frequency tuning of the devices through a mechanical buckling model, which allows to extract the central deflection and boundary compressive displacement of the membrane. Surprisingly, we obtain a remarkable enhancement of up to 14× the vibration amplitude attributed to a very low stiffness of the membrane at the buckling transition, as well as a high frequency tunability by temperature of more than 4.02$\%$ K−1. The presented results provide insights into the effects of buckling on the dynamics of free-standing 2D materials and thereby open up opportunities for the realization of 2D resonant sensors with buckling-enhanced sensitivity.@en

Suspended drums made of 2D materials hold potential for sensing applications. However, the industrialization of these applications is hindered by significant device-to-device variations presumably caused by non-uniform stress distributions induced by the fabrication process. Here, we introduce a methodology to determine the stress distribution from their mechanical resonance frequencies and corresponding mode shapes as measured by a laser Doppler vibrometer (LDV). To avoid limitations posed by the optical resolution of the LDV, we leverage a manufacturing process to create ultra-large graphene drums with diameters of up to 1000 μm. We solve the inverse problem of a Föppl–von Kármán plate model by an iterative procedure to obtain the stress distribution within the drums from the experimental data. Our results show that the generally used uniform pre-tension assumption overestimates the pre-stress value, exceeding the averaged stress obtained by more than 47%. Moreover, it is found that the reconstructed stress distributions are bi-axial, which likely originates from the transfer process. The introduced methodology allows one to estimate the tension distribution in drum resonators from their mechanical response and thereby paves the way for linking the used fabrication processes to the resulting device performance.

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Most microphones detect sound-pressure-induced motion of a membrane. In contrast, we introduce a microphone that operates by monitoring sound-pressure-induced modulation of the air compressibility. By driving a graphene membrane at resonance, the gas, that is trapped in a squeeze-film beneath it, is compressed at high frequency. Since the gas-film stiffness depends on the air pressure, the resonance frequency of the graphene is modulated by variations in sound pressure. We demonstrate that this squeeze-film microphone principle can be used to detect sound and music by tracking the membrane’s resonance frequency using a phase-locked loop. The squeeze-film microphone potentially offers advantages like increased dynamic range, lower susceptibility to pressure- induced failure and vibration-induced noise over conventional devices. Moreover, microphones might become much smaller, as demonstrated in this work with one that operates using a circular graphene membrane with an area that is more than 1000 times smaller than that of MEMS microphones. @en

Acoustic levitation is an attractive and versatile technique that offers several advantages in terms of particle size, range, reconfigurability, and ease of use with respect to alternative levitating techniques. In this paper, we study the use of active damping to improve the response time and positioning precision of an acoustic levitator operating in air. We use a laser Doppler vibrometer to measure the velocity of a levitated particle. Using this information, a control algorithm is designed and implemented to provide active damping. By system identification and modeling, we demonstrate that the active damper mechanism is well-predictable by models and can be electronically reconfigured and controlled.

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Heat transport in two dimensions is fundamentally different from that in three dimensions. As a consequence, the thermal properties of 2D materials are of great interest, from both scientific and application points of view. However, few techniques are available for the accurate determination of these properties in ultrathin suspended membranes. Here, we present an optomechanical methodology for extracting the thermal expansion coefficient, specific heat, and thermal conductivity of ultrathin membranes made of 2H-TaS₂, FePS₃, polycrystalline silicon, MoS₂, and WSe₂. The obtained thermal properties are in good agreement with the values reported in the literature for the same materials. Our work provides an optomechanical method for determining the thermal properties of ultrathin suspended membranes, which are difficult to measure otherwise. It provides a route toward improving our understanding of heat transport in the 2D limit and facilitates engineering of 2D structures with a dedicated thermal performance.

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Resonators based on two-dimensional (2D) materials have exceptional properties for application as nanomechanical sensors, which allows them to operate at high frequencies with high sensitivity. However, their performance as nanomechanical sensors is currently limited by their low quality ( Q )-factor. Here, we make use of micro-electromechanical systems (MEMS) to apply pure in-plane mechanical strain, enhancing both their resonance frequency and Q-factor. In contrast to earlier work, the 2D material resonators are fabricated on the MEMS actuators without any wet processing steps using a dry-transfer method. A platinum clamp, which is deposited by electron beam-induced deposition, is shown to be effective in fixing the 2D membrane to the MEMS and preventing slippage. By in-plane straining the membranes in a purely mechanical fashion, we increase the tensile energy, thereby diluting dissipation. This way, we show how dissipation dilution can increase the Q -factor of 2D material resonators by 91%. The presented MEMS actuated dissipation dilution method does not only pave the way toward higher Q -factors in resonators based on 2D materials, but also provides a route toward studies of the intrinsic loss mechanisms of 2D materials in the monolayer limit.

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Fluid flow processes such as drainage and evaporation in porous media are crucial in geological and biological systems. The motion of the displacement front of a moving fluid through multi-phase interfaces is often associated with abrupt mechanical energy release, detectable as acoustic emissions (AEs). The exact origin of these pulses and their damping mechanisms are still subjects of debate. Here, we study the characteristics of such AEs during evaporation of water from artificial microfluidic vessels, inspired by the physiology of vascular water-transport in plants. From the extracted settling times of the recorded AEs, we identify three pulse types and attribute their origins to bubble formation, snap-off events and rapid pore invasion. We also show that the resonance frequencies between 10 and 70 kHz present in specific pulse types decrease with increasing vessel radius (ranging from 0.25 to 1.0 mm) and length (ranging from 2.5 to 10.0 mm). Our findings provide insight into evaporation-induced AEs from microfluidic systems, and their potential use in non-invasive inspection or vascular health monitoring.

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Microphones exploit the motion of suspended membranes to detect sound waves. Since the microphone performance can be improved by reducing the thickness and mass of its sensing membrane, graphene-based microphones are expected to outperform state-of-the-art microelectromechanical (MEMS) microphones and allow further miniaturization of the device. Here, we present a laser vibrometry study of the acoustic response of suspended multilayer graphene membranes for microphone applications. We address performance parameters relevant for acoustic sensing, including mechanical sensitivity, limit of detection and nonlinear distortion, and discuss the trade-offs and limitations in the design of graphene microphones. We demonstrate superior mechanical sensitivities of the graphene membranes, reaching more than 2 orders of magnitude higher compliances than commercial MEMS devices, and report a limit of detection as low as 15 dB_SPL, which is 10-15 dB lower than that featured by current MEMS microphones.

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To ensure a sustainable future and combat food scarcity, we must boost agricultural productivity, improve climate resilience and optimize resource usage. There is untapped potential for dense wireless sensor networks in agriculture that can increase yields and support resilient production when linked to smart decision and control systems.@en

To better understand the interactions between biological molecules, a high optical resolution in all three dimensions is crucial. The intrinsically lower axial resolution of microscopes however, is a limiting factor in fluorescence imaging, correspondingly in fluorescence based single molecule localization microscopy (SMLM). Here, we present a method to improve the axial localization precision in SMLM by combining point-spread-function engineering with total internal reflection fluorescence (TIRF) fields with decay lengths that vary within the on-time of a fluorophore. Such time-varying illumination field intensity allows one to extract additional axial location information from the emitted photons. With this time varying illumination approach, we show that axial localization is improved two-fold over TIRF-based SMLM using astigmatic PSFs. We calculate theoretical resolution gains for various imaging conditions via the Cramér Rao Lower Bound (CRLB), a commonly used metric to compute the best attainable localization precision in SMLM.

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Atomic layer deposition (ALD), a layer-by-layer controlled method to synthesize ultrathin materials, provides various merits over other techniques such as precise thickness control, large area scalability and excellent conformality. Here we demonstrate the possibility of using ALD growth on top of suspended 2D materials to fabricate nanomechanical resonators. We fabricate ALD nanomechanical resonators consisting of a graphene/MoS₂ heterostructure. Using atomic force microscope indentation and optothermal drive, we measure their mechanical properties including Young’s modulus, resonance frequency and quality factor, showing a lower energy dissipation compared to their exfoliated counterparts. We also demonstrate the fabrication of nanomechanical resonators by exfoliating an ALD grown NbS₂ layer. This study exemplifies the potential of ALD techniques to produce high-quality suspended nanomechanical membranes, providing a promising route towards high-volume fabrication of future multilayer nanodevices and nanoelectromechanical systems.

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We propose to use the State Estimation by Sum-of-Norms Regularisation (STATESON-)algorithm for recovering the tip-sample interaction in high-speed tapping mode atomic force microscopy (AFM). This approach enables accurate sample height estimation for each independent cantilever oscillation period, provided that the tip-sample interaction dominates the noise. The entire course of the cantilever deflection signal is compared to a modelled counterpart in subsequent convex minimisations, such that the sparse tip-sample interaction can be recovered. Afterwards, the sample height is determined using the minimum smoothed cantilever deflection per cantilever oscillation period. Results from simulation experiments are in favour of the proposed approach as it consistently reveals sharp edges in sample height, as opposed to both the conventional and a closely related existing approach. However, the non-processed cantilever deflection provided most accurate sample height estimation. It is recommended to implement the STATESON-algorithm in the form of a filter to use it in feedback control of the scanner and cantilever excitation.

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The resonance frequency of ultra-thin layered nanomaterials changes nonlinearly with the tension induced by the pressure from the surrounding gas. Although the dynamics of pressurized nanomaterial membranes have been extensively explored, recent experimental observations show significant deviations from analytical predictions. Here, we present a multi-mode continuum model that captures the nonlinear pressure-frequency response of pre-tensioned membranes undergoing large deflections. We validate the model using experiments conducted on polysilicon nanodrums excited opto-thermally and subjected to pressure changes in the surrounding medium. We demonstrate that considering the effect of pressure on the nanodrum tension is not sufficient for determining the resonance frequencies. In fact, it is essential to also account for the change in the membrane’s shape in the pressurized configuration, the mid-plane stretching, and the contributions of higher modes to the mode shapes. Finally, we show how the presented high-frequency mechanical characterization method can serve as a fast and contactless method for determining Young’s modulus of ultra-thin membranes.

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A low-cost glass-based microfluidic flow cell with a piezo actuator is built using off-the-shelf parts (total cost €9 per device) to apply acoustophoretic force on polystyrene micro-beads. The main challenge in the fabrication of these devices was to ensure their leak tightness, which we solved using double-sided tape and nail polish. Beads with 1.5 μm diameter flowing in a 100 μm deep channel were trapped at 7.5 MHz using a 23.7 peak-to-peak voltage (V_pp) sinusoidal input. The trap located at 50 ± 0.1 μm depth was measured to have a stiffness of approximately 0.6 pN/μm. With this simple device we can trap and control the axial position of micrometer scale objects, which allows for the manipulation of beads and cells. We intend to use the device for force spectroscopy on micro-bead tethered DNA. This can be combined with super-resolution imaging techniques to study mechanics and binding of protein structures along a DNA strand as a function of induced tension.

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Heat transport by acoustic phonons in two-dimensional (2D) materials is fundamentally different from that in 3D crystals because the out-of-plane phonons propagate in a unique way that strongly depends on tension and bending rigidity. Here, using optomechanical techniques, we experimentally demonstrate that the heat transport time in freestanding graphene membranes is significantly higher than the theoretical prediction, and decreases by as much as 33% due to an electrostatically induced tension of 0.07 N/m. Using phonon scattering and Debye models, we explain these observations by the tension-enhanced acoustic impedance match of flexural phonons at the boundary of the graphene membrane. Thus, we experimentally elucidate the tunability of phononic heat transport in 2D materials by tension, and open a route towards electronic devices and circuits for high-speed control of temperature at the nanoscale.

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Conoscopic interferometry is a promising detection technique for ultrafast acoustics. By focusing a probe beam through a birefringent crystal before passing it through a polarizer, conoscopic interferences sculpt the spatial profile of the beam. The use of these patterns for acoustic wave detection revealed a higher detection sensitivity over existing techniques, such as reflectometry and beam distortion detection. However, the physical origin of the increased sensitivity is unknown. In this work, we present a model, describing the sensitivity behavior of conoscopic interferometry with respect to the quarter-wave plate orientation and the diaphragm aperture, which is validated experimentally. Using the model, we optimize the detection sensitivity of conoscopic interferometry. We obtain a maximal sensitivity of detection when placing the diaphragm edge on the dark fringes of the conoscopic interference patterns. In the configurations studied in this work, conoscopic interferometry can be 18 dB more sensitive to acoustic waves than beam distortion detection.

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We report an avalanche-mode light-emitting transistor (AMLET) in silicon (Si), based on a lateral bipolar junction, which emits light near 760 nm optical wavelength with a record low bandwidth of 38 nm. The AMLET, designed in a CMOS-compatible silicon-on-insulator (SOI) photonics platform, is optically confined within a 0.21 ∼\μ m thick SOI layer, which forms a Fabry-Pérot (FP) resonator perpendicular to the Si surface. Light is emitted from the reverse biased emitter-base junction via phonon-assisted hot carrier recombination and, additionally, minority carriers are injected via the forward-biased Base-Collector junction. The combination of injection from collector terminal through a narrow base and FP optical resonance, yields a high optical power efficiency of 4.3\× 10-6 at V BC=0.8 V and V EB=10 V. Our work opens new possibilities in spectral-engineering of Si light-emitters, which could boost performance of all-Si optical interconnects and sensors.

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Although it is well known that plants emit acoustic pulses under drought stress, the exact origin of the waveform of these ultrasound pulses has remained elusive. Here, we present evidence for a correlation between the characteristics of the waveform of these pulses and the dimensions of xylem conduits in plants. Using a model that relates the resonant vibrations of a vessel to its dimension and viscoelasticity, we extract the xylem radii from the waveforms of ultrasound pulses and show that these are correlated and in good agreement with optical microscopy. We demonstrate the versatility of the method by applying it to shoots of ten different vascular plant species. In particular, for Hydrangea quercifolia, we further extract vessel element lengths with our model and compare them with scanning electron cryomicroscopy. The ultrasonic, noninvasive characterization of internal conduit dimensions enables a breakthrough in speed and accuracy in plant phenotyping and stress detection.@en

We report on the effect of Fabry-Pérot (FP) resonance on hot-carrier electroluminescence (EL) spectra and the optical power efficiencies of silicon (Si) avalanche-mode (AM) LEDs in the wavelength range from 500 nm to 950 nm. The LEDs, fabricated in a silicon-on-insulator photonics technology, consist of symmetric p-n junctions placed within a 0.21 µm thick Si micro-ring of varying width and radius. We show that the peak wavelength in the EL-spectra can be tuned within a range of 100 nm by varying the ring width from 0.16 µm to 0.30 µm, which is explained by FP resonance. The measured EL-spectra features relatively narrow bands (with a spectral width of ∼50 nm) with high intensities compared to conventional Si AMLEDs. By varying the ring radius and using a high doping level, we obtain a record high optical power efficiency of 3.2×10−5. Our work is a breakthrough in engineering the EL spectrum of Si, foreseen to benefit the performance of Si-integrated optical interconnects and sensors.@en