Non-catalyst and low temperature growth of vertically aligned carbon nanotubes for nanosensors arrays

Relative humidity sensors for harsh enviroments

Silicon carbide membrane relative humidity sensor with aluminium electrodes

SiC passive optomechanical transducer head for sensor applications

Relative humidity sensors using porous SiC membranes and Al electrodes

Membrane porous-SiC humidity sensor with aluminium electrodes

Development of post processing micromachining modules for integrated sensors and actuators applications

Dry etching release of structures in post-processing surface micromachining using polyimide as a sacrificial layer

Through-wafer copper electroplating for 3-D interconnects

Novel material for low temperature post-processing micromachining

Polyimide sacrificial layer for postprocessing surface micromachining

Influence of deposition parameter and temperature on stress and strain of in-situ doped PECVD silicon carbide

Investigation of the influence of measurement frequency on the response of humidity sensors based on porous si, porous polysilicon and porous sic

Effect on annealing on mechanical and optical properties of in-situ doped SiC thin films

New post-processing modules

Evaluation of in-situ doped PECVD SiC thin films for surface micromachining

Mechanical and structural properties of in-situ doped PECVD silicon carbide layer for post-processing surface micromachining