Mechanical and structural properties of in-situ doped PECVD silicon carbide layer for post-processing surface micromachining

Pham, HMT; de Boer, C.R.; Kwakernaak, K; Sloof, W.G.; Sarro, Pasqualina M

Mechanical and structural properties of in-situ doped PECVD silicon carbide layer for post-processing surface micromachining

Conference paper (2001)

Authors

HMT Pham External organisation

C.R. de Boer Electronic Components, Technology and Materials -

K Kwakernaak External organisation

W.G. Sloof OLD Virtual Materials and Mechanics

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

To reference this document use:

http://resolver.tudelft.nl/uuid:d662a1c5-bc8a-4843-a818-2072970ad166

More Info

expand_more

Published Date

2001

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials