K Kwakernaak | TU Delft Repository

KK

K Kwakernaak

Conference paper (3)

3 records found

1

Very thin SiC membranes for micromachines vacuum sensors

Conference paper (2008) - HTM Pham (author) , C Fan (author) , G Pandraud (author) , J.F. Creemer (author) , N.M. van der Pers (author) , P Visser (author) , K Kwakernaak (author) , Lina Sarro (author)

Mechanical and structural properties of in-situ doped PECVD silicon carbide layer for post-processing surface micromachining

Conference paper (2001) - HMT Pham (author) , CR De Boer (author) , K Kwakernaak (author) , W. G. Sloof (author) , PM Sarro (author)

Evaluation of in-situ doped PECVD SiC thin films for surface micromachining

Conference paper (2001) - HMT Pham (author) , CR De Boer (author) , K Kwakernaak (author) , W. G. Sloof (author) , PM Sarro (author)