K Kwakernaak | TU Delft Repository

KK

K Kwakernaak

Conference paper (3)

3 records found

1

Very thin SiC membranes for micromachines vacuum sensors

Conference paper (2008) - HTM Pham (author), HTM Pham (author), C Fan (author), Gregory Pandraud (author), G. Pandraud (author), G Pandraud (author), J.F. Creemer (author), JF Creemer (author), N.M. van der Pers (author), P Visser (author), P. Visser (author), P. Visser (author), P Visser (author), K Kwakernaak (author), P. M. Sarro (author), Lina Sarro (author), Pasqualina Maria Sarro (author), Pasqualina M. Sarro (author), P.M. Sarro (author), Pasqualina M Sarro (author)

Mechanical and structural properties of in-situ doped PECVD silicon carbide layer for post-processing surface micromachining

Conference paper (2001) - HMT Pham (author), CR De Boer (author), Charles de Boer (author), Charles De Boer (author), C.R. De Boer (author), C.R. de Boer (author), CR de Boer (author), K Kwakernaak (author), WG Sloof (author), W. G. Sloof (author), W.G. Sloof (author), Willem G. Sloof (author), Pasqualina Maria Sarro (author), P. M. Sarro (author), Pasqualina M. Sarro (author), P.M. Sarro (author), Lina Sarro (author), Pasqualina M Sarro (author)

Evaluation of in-situ doped PECVD SiC thin films for surface micromachining

Conference paper (2001) - HMT Pham (author), CR De Boer (author), Charles de Boer (author), Charles De Boer (author), C.R. De Boer (author), C.R. de Boer (author), CR de Boer (author), K Kwakernaak (author), WG Sloof (author), W. G. Sloof (author), W.G. Sloof (author), Willem G. Sloof (author), Pasqualina Maria Sarro (author), P. M. Sarro (author), Pasqualina M. Sarro (author), P.M. Sarro (author), Lina Sarro (author), Pasqualina M Sarro (author)