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KK
K Kwakernaak
Academic Work (3)
Conference paper (3)
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3 records found
1
Very thin SiC membranes for micromachines vacuum sensors
Conference paper (2008) -
HTM Pham (author)
,
C Fan (author)
,
G. Pandraud (author)
,
J.F. Creemer (author)
,
N.M. van der Pers (author)
,
P Visser (author)
,
K Kwakernaak (author)
,
Pasqualina M Sarro (author)
Mechanical and structural properties of in-situ doped PECVD silicon carbide layer for post-processing surface micromachining
Conference paper (2001) -
HMT Pham (author)
,
C.R. de Boer (author)
,
K Kwakernaak (author)
,
W.G. Sloof (author)
,
Pasqualina M Sarro (author)
Evaluation of in-situ doped PECVD SiC thin films for surface micromachining
Conference paper (2001) -
HMT Pham (author)
,
C.R. de Boer (author)
,
K Kwakernaak (author)
,
W.G. Sloof (author)
,
Pasqualina M Sarro (author)
