Very thin SiC membranes for micromachines vacuum sensors

Pham, HTM; Fan, C; Pandraud, G.; Creemer, J.F.; van der Pers, N.M.; Visser, P; Kwakernaak, K; Sarro, Pasqualina M

Very thin SiC membranes for micromachines vacuum sensors

Conference paper (2008)

Authors

HTM Pham Old - EWI Sect. ECTM

C Fan External organisation

G. Pandraud Electronic Instrumentation -

J.F. Creemer Electronic Instrumentation -

N.M. van der Pers OLD Virtual Materials and Mechanics

P Visser OLD Virtual Materials and Mechanics

K Kwakernaak External organisation

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Old - EWI Sect. ECTM

To reference this document use:

http://resolver.tudelft.nl/uuid:231f7eff-deaa-4c94-b75e-ecce29cb2b6c

More Info

expand_more

Published Date

2008

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

Old - EWI Sect. ECTM