Dynamical back-action effects in low loss optomechanical oscillators

Design of silicon micro-resonators with low mechanical and optical losses for quantum optics experiments

Polyimide sacrificial layer for an all-dray post-process surface micromachining module

Dry etching release of structures in post-processing surface micromachining using polyimide as a sacrificial layer

Polyimide sacrificial layer for postprocessing surface micromachining