Dry etching release of structures in post-processing surface micromachining using polyimide as a sacrificial layer

Bagolini, A; Pham, HMT; Scholtes, T.L.M.; Pakula, L.S.; Sarro, PM

Dry etching release of structures in post-processing surface micromachining using polyimide as a sacrificial layer

Conference paper (2001)

Authors

A Bagolini External organisation

HMT Pham External organisation

T.L.M. Scholtes Electronic Components, Technology and Materials

L.S. Pakula Electronic Instrumentation

PM Sarro Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

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Published Date

2001

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Research Group

Electronic Components, Technology and Materials

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