Dry etching release of structures in post-processing surface micromachining using polyimide as a sacrificial layer

Conference paper (2001)

Authors

A Bagolini External organisation
HMT Pham External organisation
T.L.M. Scholtes Electronic Components, Technology and Materials - EEMCS
L.S. Pakula Electronic Instrumentation - EEMCS
Lina Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2001

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials