We experimentally investigate a mechanical squeezed state realized in a parametrically modulated membrane resonator embedded in an optical cavity. We demonstrate that a quantum characteristic of the squeezed dynamics can be revealed and quantified even in a moderately warm oscillator, through the analysis of motional sidebands. We provide a theoretical framework for quantitatively interpreting the observations and present an extended comparison with the experiment. A notable result is that the spectral shape of each motional sideband provides a clear signature of a quantum mechanical squeezed state without the necessity of absolute calibrations, in particular in the regime where residual fluctuations in the squeezed quadrature are reduced below the zero-point level.

@en

According to quantum mechanics, if we keep observing a continuous variable we generally disturb its evolution. For a class of observables, however, it is possible to implement a so-called quantum nondemolition measurement: by confining the perturbation to the conjugate variable, the observable is estimated with arbitrary accuracy, or prepared in a well-known state. For instance, when the light bounces on a movable mirror, its intensity is not perturbed (the effect is just seen on the phase of the radiation), but the radiation pressure allows one to trace back its fluctuations by observing the mirror motion. In this work, we implement a cavity optomechanical experiment based on an oscillating micromirror, and we measure correlations between the output light intensity fluctuations and the mirror motion. We demonstrate that the uncertainty of the former is reduced below the shot-noise level determined by the corpuscular nature of light.@en

Summary form only given. According to quantum mechanics, there exists a class of observables for which is possible to confine the perturbation produced by a continuous measurement to the conjugate variable. Therefore, it is possible to devise experimental schemes that allow estimating the observed variable with arbitrary accuracy, or preparing it in a well-known state. Such schemes are referred to as quantum non-demolition measurements (QND). Among these observables there is the amplitude of the light field. Indeed, it is possible to exploit a movable mirror to implement a QND scheme [1]. Intensity fluctuations of an optical field impinging on it are not affected by the interaction. However, the movable mirror is excited by the associated radiation pressure. This, in turn, affects the phase of the field.We have performed an optomechanical experiment, based on a Fabry-Pérot cavity in which the end mirror is a high Q micro-mechanical device [2], where we have simultaneously measured intensity fluctuations of the field reflected by the cavity and the mirror motion imprinted in the phase fluctuations. By exploiting the correlations between these variables, we demonstrate a reduced uncertainty on intensity fluctuations actually achieving a sub-shot noise level.@en

In view of the integration of membrane resonators with more complex MEMS structures, we developed a general fabrication procedure for circular shape SiN_x membranes using Deep Reactive Ion Etching (DRIE). Large area and high-stress SiN_x membranes were fabricated and used as optomechanical resonators in a Michelson interferometer, where Q values up to 1.3 × 10⁶ were measured at cryogenic temperatures, and in a Fabry-Pérot cavity, where an optical finesse up to 50000 has been observed.

@en

In the context of a recoil damping analysis, we have designed and produced a membrane resonator equipped with a specific on-chip structure working as a "loss shield" for a circular membrane. In this device the vibrations of the membrane, with a quality factor of 107, reach the limit set by the intrinsic dissipation in silicon nitride, for all the modes and regardless of the modal shape, also at low frequency. Guided by our theoretical model of the loss shield, we describe the design rationale of the device, which can be used as effective replacement of commercial membrane resonators in advanced optomechanical setups, also at cryogenic temperatures.@en

We report the experimental observation of two-mode squeezing in the oscillation quadratures of a thermal micro-oscillator. This effect is obtained by parametric modulation of the optical spring in a cavity optomechanical system. In addition to stationary variance measurements, we describe the dynamic behavior in the regime of pulsed parametric excitation, showing an enhanced squeezing effect surpassing the stationary 3 dB limit. While the present experiment is in the classical regime, our technique can be exploited to produce entangled, macroscopic quantum optomechanical modes.@en