Fabrication and characterization of low loss MOMS resonators for cavity opto-mechanics

Serra, E.; Bonaldi, M.; Borrielli, Antonio; Marin, F.; Marconi, L.; Marino, F.; Pandraud, G; Pontin, A.; Prodi, G.A.; Sarro, Lina

Fabrication and characterization of low loss MOMS resonators for cavity opto-mechanics

Journal article (2015)

Authors

E. Serra Electronic Components, Technology and Materials

M. Bonaldi External organisation

Antonio Borrielli External organisation

F. Marin External organisation

L. Marconi External organisation

F. Marino External organisation

G Pandraud Electronic Components, Technology and Materials

A. Pontin External organisation

G.A. Prodi External organisation

Lina Sarro Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

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Published Date

2015

Language

English

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Research Group

Electronic Components, Technology and Materials

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