Mv

M van de Wal

4 records found

Authored

Next-Generation Wafer Stage Motion Control: Connecting System Identification and Robust Control

Experimental evaluation of robust-control-relevance: a confrontation with a next-generation wafer stage
Conference paper (2010) - R.A.P. van Herpen, T Oomen, M van de Wal, O.H. Bosgra

Nominal and robust feedforward design with time domain constraints applied to a wafer stage

Multivariable feedback control design for high-precision wafer stage motion
Journal article (2002) - M van de Wal, G van Baars, F Sperling, O.H. Bosgra