M van de Wal | TU Delft Repository

Mv

M van de Wal

Conference paper (2)

Journal article (2)

4 records found

1

Next-Generation Wafer Stage Motion Control: Connecting System Identification and Robust Control

Conference paper (2012) - Tom Oomen (author), R.A.P. van Herpen (author), S Quist (author), M van de Wal (author), O.H. Bosgra (author), M Steinbuch (author)

Experimental evaluation of robust-control-relevance: a confrontation with a next-generation wafer stage

Conference paper (2010) - R.A.P. van Herpen (author), Tom Oomen (author), M van de Wal (author), O.H. Bosgra (author)

Nominal and robust feedforward design with time domain constraints applied to a wafer stage

Journal article (2006) - E. de Gelder (author), M van de Wal (author), C.W. Scherer (author), CWJ Hol (author), O.H. Bosgra (author)

Multivariable feedback control design for high-precision wafer stage motion

Journal article (2002) - M van de Wal (author), G van Baars (author), F Sperling (author), O.H. Bosgra (author)