Multivariable feedback control design for high-precision wafer stage motion

Journal article (2002)

Authors

M van de Wal Old - WbMT
G van Baars External organisation
F Sperling External organisation
O.H. Bosgra DISC - Mechanical, Maritime and Materials Engineering
Research Group
Old - WbMT
More Info
expand_more

Published Date

2002

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

Old - WbMT