F Sperling | TU Delft Repository

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F Sperling

Conference paper (1)

Journal article (1)

2 records found

1

Multivariable feedback control design for high-precision wafer stage motion

Journal article (2002) - M van de Wal (author) , G van Baars (author) , F Sperling (author) , OH Bosgra (author)

Experimentally validated multivariable feedback controller design for a high-precision wafer stage

Conference paper (2001) - M van der Wal (author) , G van Baars (author) , F Sperling (author) , O.H. Bosgra (author)