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F Sperling
Academic Work (2)
Conference paper (1)
Journal article (1)
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2 records found
1
Multivariable feedback control design for high-precision wafer stage motion
Journal article (2002) -
M van de Wal (author)
,
G van Baars (author)
,
F Sperling (author)
,
OH Bosgra (author)
,
O.H. Bosgra (author)
Experimentally validated multivariable feedback controller design for a high-precision wafer stage
Conference paper (2001) -
M van der Wal (author)
,
G van Baars (author)
,
F Sperling (author)
,
O.H. Bosgra (author)
,
OH Bosgra (author)
