Experimentally validated multivariable feedback controller design for a high-precision wafer stage

Conference paper (2001)

Authors

M van der Wal External organisation
G van Baars External organisation
F Sperling External organisation
Research Group
DISC
More Info
expand_more

Published Date

2001

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

DISC

No files available

Metadata only record. There are no files for this conference paper.