Experimentally validated multivariable feedback controller design for a high-precision wafer stage

Conference paper (2001)

Authors

M van der Wal External organisation
G van Baars External organisation
F Sperling External organisation
O.H. Bosgra DISC - Mechanical, Maritime and Materials Engineering
Research Group
DISC (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2001

Language

Undefined/Unknown

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Delft Center for Systems and Control

Research Group

DISC