Nominal and robust feedforward design with time domain constraints applied to a wafer stage

Journal article (2006)

Authors

E. de Gelder External organisation
M van de Wal Old - WbMT
C.W. Scherer DISC - Mechanical, Maritime and Materials Engineering
CWJ Hol DISC - Mechanical, Maritime and Materials Engineering
O.H. Bosgra DISC - Mechanical, Maritime and Materials Engineering
Research Group
Old - WbMT
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Published Date

2006

Language

Undefined/Unknown

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Research Group

Old - WbMT