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SQ
S Quist
Academic Work (2)
Conference paper (2)
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2 records found
1
Next-Generation Wafer Stage Motion Control: Connecting System Identification and Robust Control
Conference paper (2012) -
T Oomen (author)
,
R.A.P. van Herpen (author)
,
S Quist (author)
,
M van de Wal (author)
,
O.H. Bosgra (author)
,
M Steinbuch (author)
Identification and visualization of robust-control-relevant model sets with application to an industrial wafer stage
Conference paper (2010) -
T Oomen (author)
,
S Quist (author)
,
R.A.P. van Herpen (author)
,
O.H. Bosgra (author)
