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SQ
S Quist
2 records found
1
Authored
Next-Generation Wafer Stage Motion Control: Connecting System Identification and Robust Control
Conference paper (2012) -
T Oomen
,
R.A.P. van Herpen
,
S Quist
,
M van de Wal
,
O.H. Bosgra
,
M Steinbuch
Identification and visualization of robust-control-relevant model sets with application to an industrial wafer stage
Conference paper (2010) -
T Oomen
,
S Quist
,
R.A.P. van Herpen
,
O.H. Bosgra
