Identification and visualization of robust-control-relevant model sets with application to an industrial wafer stage

Oomen, Tom; Quist, S; van Herpen, R.A.P.; Bosgra, O.H.

Identification and visualization of robust-control-relevant model sets with application to an industrial wafer stage

Conference paper (2010)

Authors

Tom Oomen External organisation

S Quist External organisation

R.A.P. van Herpen Building Physics

O.H. Bosgra DISC

Research Group

Building Physics

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Published Date

2010

Language

English

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Research Group

Building Physics

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