R.A.P. van Herpen | TU Delft Repository

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R.A.P. van Herpen

Conference paper (4)

4 records found

1

Next-Generation Wafer Stage Motion Control: Connecting System Identification and Robust Control

Conference paper (2012) - T Oomen (author), R.A.P. van Herpen (author), S Quist (author), M van de Wal (author), O.H. Bosgra (author), M Steinbuch (author)

Bi-Orthonormal Basis Functions for Improved Frequency-Domain System Identification

Conference paper (2012) - R.A.P. van Herpen (author), T Oomen (author), O.H. Bosgra (author)

Identification and visualization of robust-control-relevant model sets with application to an industrial wafer stage

Conference paper (2010) - T Oomen (author), S Quist (author), R.A.P. van Herpen (author), O.H. Bosgra (author)

Experimental evaluation of robust-control-relevance: a confrontation with a next-generation wafer stage

Conference paper (2010) - R.A.P. van Herpen (author), T Oomen (author), M van de Wal (author), O.H. Bosgra (author)