Experimental evaluation of robust-control-relevance: a confrontation with a next-generation wafer stage

Conference paper (2010)

Authors

R.A.P. van Herpen Building Physics - Architecture and the Built Environment
Tom Oomen External organisation
M van de Wal Old - WbMT
O.H. Bosgra DISC - Mechanical, Maritime and Materials Engineering
Research Group
Building Physics (Architecture and the Built Environment) (TU Delft)
More Info
expand_more

Published Date

2010

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Architecture and the Built Environment

Department

Architectural Engineering +Technology

Research Group

Building Physics