Next-Generation Wafer Stage Motion Control: Connecting System Identification and Robust Control

Conference paper (2012)

Authors

T Oomen External organisation
R.A.P. van Herpen Building Physics - Architecture and the Built Environment
S Quist External organisation
M van de Wal Old - WbMT
O.H. Bosgra DISC - Mechanical, Maritime and Materials Engineering
M Steinbuch External organisation
Research Group
Building Physics (Architecture and the Built Environment) (TU Delft)
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Published Date

2012

Language

Undefined/Unknown

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Faculty

Architecture and the Built Environment

Department

Architectural Engineering +Technology

Research Group

Building Physics