Next-Generation Wafer Stage Motion Control: Connecting System Identification and Robust Control

Conference paper (2012)

Authors

Tom Oomen External organisation
R.A.P. van Herpen Building Physics
S Quist External organisation
M van de Wal Old - WbMT
M Steinbuch External organisation
Research Group
Building Physics
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Published Date

2012

Language

Undefined/Unknown

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Research Group

Building Physics

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