HO

H Ohji

16 records found

Fabrication of a DNA separation chip using macroporous silicon micromachining

Fabrication of mechanical structures using macro-porous silicon

Pillar structures with the space of sub-microns fabricated by the macroporous based micromachining

Macroporous-based micromachining on full wafers

Fabrication of mechanical structures using macro-porous silicon

Electrochemical etching for n-type silicon using a novel etchant

Macroporous based micromachining on full wafers

Fabrication of mechanical structures in p-type silicon using electrochemical etching

Fabrication of a beam-mass structure using single-step electochemical etching for micro structures (SEEMS)

Initial pits for electrochemical etching in hydrofluoric acid

Study of electrochemical etching for 3-D device design

Initial pits for electrochemical etching in hydrofluoric acid

Fabrication of accelerometer using single-step electrochemical etching for micro structures (SEEMS)

Single step electrochemical etching in ammonium fluoride
Journal article (1999) - H Ohji (author), P.J. French (author)

Fabrication of mechanical structures in p-type silicon using electrochemical etching

Combination of epipoly and electropolishing for fabrication of accelerometers with large substrate separation gaps