Combination of epipoly and electropolishing for fabrication of accelerometers with large substrate separation gaps

Conference paper (1999)

Authors

PTJ Gennissen External organisation
H Ohji External organisation
Patrick J. French Electronic Instrumentation
CMA Ashruf Electronic Instrumentation
G.M. O'Halloran External organisation
P. M. Sarro Electronic Components, Technology and Materials
Research Group
Electronic Instrumentation
More Info
expand_more

Published Date

1999

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

Electronic Instrumentation