PTJ Gennissen | TU Delft Repository

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PTJ Gennissen

Conference paper (3)

Doctoral thesis (1)

Journal article (1)

5 records found

1

Fabrication of a beam-mass structure using single-step electochemical etching for micro structures (SEEMS)

Journal article (2000) - H Ohji (author), PTJ Gennissen (author), P. J. French (author), Patrick J. French (author), Paddy J. French (author), Pim J. French (author), P.J. French (author), PJ French (author), Paddy French (author), K Tsutsumi (author)

Development of silicon accelerometers using epi-micromachining

Conference paper (1999) - PTJ Gennissen (author), P.J. French (author), Paddy French (author), P. J. French (author), Pim J. French (author), Patrick J. French (author), PJ French (author), Paddy J. French (author)

Combination of epipoly and electropolishing for fabrication of accelerometers with large substrate separation gaps

Conference paper (1999) - PTJ Gennissen (author), H Ohji (author), Patrick J. French (author), P.J. French (author), Pim J. French (author), Paddy J. French (author), PJ French (author), Paddy French (author), P. J. French (author), CMA Ashruf (author), Colin Ashruf (author), CMA Ashruf (author), Colin Ashruf (author), G.M. O'Halloran (author), P. M. Sarro (author), Pasqualina Maria Sarro (author), PM Sarro (author), P.M. Sarro (author), Pasqualina M Sarro (author), Pasqualina M. Sarro (author), Lina Sarro (author)

Fabrication of accelerometer using single-step electrochemical etching for micro structures (SEEMS)

Conference paper (1999) - H Ohji (author), PTJ Gennissen (author), P. J. French (author), Patrick J. French (author), Paddy J. French (author), Pim J. French (author), P.J. French (author), PJ French (author), Paddy French (author), K Tsutsumi (author)

Micromachining techniques using layers grown in an epitaxial reactor

Doctoral thesis (1999) - PTJ Gennissen (author)