Scintillation Properties of Praseodymium Activated Lu3Al5O12 Single Crystals

A novel electrochemical etching technique for n-type silicon

Pillar structures with a sub-micron space fabricated by macroporous-based micromachining

Fabrication of mechanical structures using macro-porous silicon

Macroporous-based micromachining on full wafers

Pillar structures with the space of sub-microns fabricated by the macroporous based micromachining

Fabrication of mechanical structures using macro-porous silicon

Fabrication of a DNA separation chip using macroporous silicon micromachining

Electrochemical etching for n-type silicon using a novel etchant

Fabrication of mechanical structures in p-type silicon using electrochemical etching

Initial pits for electrochemical etching in hydrofluoric acid

Study of electrochemical etching for 3-D device design

Fabrication of a beam-mass structure using single-step electochemical etching for micro structures (SEEMS)

Macroporous based micromachining on full wafers

Initial pits for electrochemical etching in hydrofluoric acid

Fabrication of accelerometer using single-step electrochemical etching for micro structures (SEEMS)

Fabrication of mechanical structures in p-type silicon using electrochemical etching