Study of electrochemical etching for 3-D device design

Izuo, S; Ohji, H; Tsutsumi, K; French, P. J.

Study of electrochemical etching for 3-D device design

Conference paper (2000)

Authors

S Izuo External organisation

H Ohji External organisation

K Tsutsumi External organisation

P. J. French Electronic Instrumentation

Research Group

Electronic Instrumentation

To reference this document use:

http://resolver.tudelft.nl/uuid:e26b5c8e-d286-4dc5-8b30-5da2afbcd03d

More Info

expand_more

Published Date

2000

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

Electronic Instrumentation

No files available

Metadata only record. There are no files for this conference paper.