12 records found
1
A novel electrochemical etching technique for n-type silicon
Pillar structures with a sub-micron space fabricated by macroporous-based micromachining
Electrochemical etching for n-type silicon using a novel etchant
Pillar structures with the space of sub-microns fabricated by the macroporous based micromachining
Fabrication of mechanical structures using macro-porous silicon
Macroporous-based micromachining on full wafers
Fabrication of a DNA separation chip using macroporous silicon micromachining
Study of electrochemical etching for 3-D device design
Macroporous based micromachining on full wafers
Initial pits for electrochemical etching in hydrofluoric acid
