SI

S Izuo

12 records found

A novel electrochemical etching technique for n-type silicon

Pillar structures with a sub-micron space fabricated by macroporous-based micromachining

Fabrication of mechanical structures using macro-porous silicon

Electrochemical etching for n-type silicon using a novel etchant

Fabrication of a DNA separation chip using macroporous silicon micromachining

Fabrication of mechanical structures using macro-porous silicon

Macroporous-based micromachining on full wafers

Pillar structures with the space of sub-microns fabricated by the macroporous based micromachining

Macroporous based micromachining on full wafers

Study of electrochemical etching for 3-D device design

Initial pits for electrochemical etching in hydrofluoric acid

Initial pits for electrochemical etching in hydrofluoric acid