Pillar structures with the space of sub-microns fabricated by the macroporous based micromachining

Ohji, H; Izuo, S; French, P. J.; Tsutsumi, K

Pillar structures with the space of sub-microns fabricated by the macroporous based micromachining

Conference paper (2001)

Authors

H Ohji External organisation

S Izuo External organisation

P. J. French Electronic Instrumentation

K Tsutsumi External organisation

Research Group

Electronic Instrumentation

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Published Date

2001

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Research Group

Electronic Instrumentation

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