Investigation of the influence of measurement frequency on the response of humidity sensors based on porous si, porous polysilicon and porous sic

Investigation of relative humidity sensors based on porous silicon, porous polysilicon and porous silicon carbide

Progress in the optimisation of the porous silicon layer of a capacitive humidity sensor based on porous silicon

Combination of epipoly and electropolishing for fabrication of accelerometers with large substrate separation gaps

Influence of the formation parameters on the humidity sensing characteristics of a capacitive humidity sensor based on porous silicon

Capacitive humidity sensor based on porous silicon