Influence of the formation parameters on the humidity sensing characteristics of a capacitive humidity sensor based on porous silicon

Conference paper (1999)

Authors

G.M. O'Halloran External organisation
W. van der Vlist Electronic Components, Technology and Materials
Pasqualina Maria Sarro Electronic Components, Technology and Materials
P.J. French Electronic Instrumentation
Research Group
Electronic Components, Technology and Materials
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Published Date

1999

Language

Undefined/Unknown

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Research Group

Electronic Components, Technology and Materials

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