Influence of the formation parameters on the humidity sensing characteristics of a capacitive humidity sensor based on porous silicon

O'Halloran, G.M.; van der Vlist, W.; Sarro, Pasqualina M; French, P.J.

Influence of the formation parameters on the humidity sensing characteristics of a capacitive humidity sensor based on porous silicon

Conference paper (1999)

Authors

G.M. O'Halloran External organisation

W. van der Vlist Electronic Components, Technology and Materials -

Pasqualina M Sarro Electronic Components, Technology and Materials -

P.J. French Electronic Instrumentation -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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Published Date

1999

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials