CF Carlstrom | TU Delft Repository

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CF Carlstrom

Conference paper (6)

Journal article (4)

10 records found

1

Comparative study of Cl-2, Cl-2/O-2, and Cl-2/N-2 inductively coupled plasma processes for etching of high-aspect-ratio photonic-crystal holes in InP

Journal article (2008) - CF Carlstrom (author), R van der Heijden (author), MSP Andriesse (author), F Karouta (author), RW van der Heijden (author), E.W.J.M. van der Drift (author), H.W.M. Salemink (author)

InP-based planar photonic crystals infiltrated with solid polymers and liquid crystals

Conference paper (2006) - RW van der Heijden (author), BKC Kjellander (author), H.W.M. Salemink (author), CF Carlstrom (author), JAP Snijders (author), HHJE Kicken (author), CWM Bastiaansen (author), DJ Broer (author), F Karouta (author), R Notzel (author), E.W.J.M. van der Drift (author)

InP-based planar photonic crystals infiltrated with solid polymers and liquid crystals

Conference paper (2006) - R van der Heijden (author), C Kjellander (author), E.W.J.M. van der Drift (author), H.W.M. Salemink (author), CF Carlstrom (author), J Snijders (author), H Kicken (author), RW van der Heijden (author), CWM Bastiaansen (author), DJ Broer (author), F Karouta (author), R Notzel (author)

Cl-2/O-2-inductively coupled plasma etching of deep hole-type photonic crystals in InP

Journal article (2006) - CF Carlstrom (author), R van der Heijden (author), F Karouta (author), RW van der Heijden (author), H.W.M. Salemink (author), E.W.J.M. van der Drift (author)

Two-dimensional photoni crystals from semiconductor material with polymer filled holes

Conference paper (2006) - R van der Heijden (author), C Kjellander (author), H.W.M. Salemink (author), CF Carlstrom (author), J Snijders (author), RW van der Heijden (author), CWM Bastiaansen (author), DJ Broer (author), F Karouta (author), R Notzel (author), E.W.J.M. van der Drift (author)

Deep hole InP photonic crystals infiltrated with solid polymers and liquid crystals

Conference paper (2006) - CF Carlstrom (author), R van der Heijden (author), C Kjellander (author), RW van der Heijden (author), CWM Bastiaansen (author), DJ Broer (author), F Karouta (author), R Notzel (author), E.W.J.M. van der Drift (author), H.W.M. Salemink (author)

InP-based two-dimensional photonic crystals filled with polymers

Journal article (2006) - R van der Heijden (author), CF Carlstrom (author), E.W.J.M. van der Drift (author), JAP Snijders (author), RW van der Heijden (author), F Karouta (author), R Notzel (author), H.W.M. Salemink (author), BKC Kjellander (author), CWM Bastiaansen (author), DJ Broer (author)

Cl-2/O-2- and Cl-2/N-2-based inductively coupled plasma etching of photonic crystals in InP: Sidewall passivation

Conference paper (2005) - R van der Heijden (author), CF Carlstrom (author), E.W.J.M. van der Drift (author), RW van der Heijden (author), R Notzel (author), R Veldhoven (author), F Karouta (author), H.W.M. Salemink (author), A Talneau (author)

Inductively coupled plasma etching of deep photonic crystal holes in InP using Cl-2

Conference paper (2005) - CF Carlstrom (author), R van der Heijden (author), AAM Kok (author), RW van der Heijden (author), F Karouta (author), JJGM van der Tol (author), R Nötzel (author), PJ van Veldhoven (author), H.W.M. Salemink (author)