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CF Carlstrom
10 records found
1
Authored
Comparative study of Cl-2, Cl-2/O-2, and Cl-2/N-2 inductively coupled plasma processes for etching of high-aspect-ratio photonic-crystal holes in InP
Journal article (2008) -
CF Carlstrom
,
R van der Heijden
,
MSP Andriesse
,
F Karouta
,
RW van der Heijden
,
E.W.J.M. van der Drift
,
H.W.M. Salemink
InP-based planar photonic crystals infiltrated with solid polymers and liquid crystals
Conference paper (2006) -
RW van der Heijden
,
BKC Kjellander
,
H.W.M. Salemink
,
CF Carlstrom
,
JAP Snijders
,
HHJE Kicken
,
CWM Bastiaansen
,
DJ Broer
,
F Karouta
,
R Notzel
,
E.W.J.M. van der Drift
Cl-2/O-2-inductively coupled plasma etching of deep hole-type photonic crystals in InP
Journal article (2006) -
CF Carlstrom
,
R van der Heijden
,
F Karouta
,
RW van der Heijden
,
H.W.M. Salemink
,
E.W.J.M. van der Drift
Deep hole InP photonic crystals infiltrated with solid polymers and liquid crystals
Conference paper (2006) -
CF Carlstrom
,
R van der Heijden
,
C Kjellander
,
RW van der Heijden
,
CWM Bastiaansen
,
DJ Broer
,
F Karouta
,
R Notzel
,
E.W.J.M. van der Drift
,
H.W.M. Salemink
Two-dimensional photoni crystals from semiconductor material with polymer filled holes
Conference paper (2006) -
R van der Heijden
,
C Kjellander
,
H.W.M. Salemink
,
CF Carlstrom
,
J Snijders
,
RW van der Heijden
,
CWM Bastiaansen
,
DJ Broer
,
F Karouta
,
R Notzel
,
E.W.J.M. van der Drift
InP-based planar photonic crystals infiltrated with solid polymers and liquid crystals
Conference paper (2006) -
R van der Heijden
,
C Kjellander
,
E.W.J.M. van der Drift
,
H.W.M. Salemink
,
CF Carlstrom
,
J Snijders
,
H Kicken
,
RW van der Heijden
,
CWM Bastiaansen
,
DJ Broer
,
F Karouta
,
R Notzel
InP-based two-dimensional photonic crystals filled with polymers
Journal article (2006) -
R van der Heijden
,
CF Carlstrom
,
E.W.J.M. van der Drift
,
JAP Snijders
,
RW van der Heijden
,
F Karouta
,
R Notzel
,
H.W.M. Salemink
,
BKC Kjellander
,
CWM Bastiaansen
,
DJ Broer
Cl-2/O-2- and Cl-2/N-2-based inductively coupled plasma etching of photonic crystals in InP: Sidewall passivation
Conference paper (2005) -
R van der Heijden
,
CF Carlstrom
,
E.W.J.M. van der Drift
,
RW van der Heijden
,
R Notzel
,
R Veldhoven
,
F Karouta
,
H.W.M. Salemink
,
A Talneau
Inductively coupled plasma etching of deep photonic crystal holes in InP using Cl-2
Conference paper (2005) -
CF Carlstrom
,
R van der Heijden
,
AAM Kok
,
RW van der Heijden
,
F Karouta
,
JJGM van der Tol
,
R Nötzel
,
PJ van Veldhoven
,
H.W.M. Salemink