Inductively coupled plasma etching of deep photonic crystal holes in InP using Cl-2

Conference paper (2005)

Authors

CF Carlstrom External organisation
R van der Heijden External organisation
AAM Kok External organisation
RW van der Heijden External organisation
F Karouta External organisation
JJGM van der Tol External organisation
R Nötzel External organisation
PJ van Veldhoven External organisation
H.W.M. Salemink QN/Afdelingsbureau
Research Group
QN/Afdelingsbureau
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Published Date

2005

Language

Undefined/Unknown

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Research Group

QN/Afdelingsbureau

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