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A Talneau
Academic Work (1)
Conference paper (1)
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Cl-2/O-2- and Cl-2/N-2-based inductively coupled plasma etching of photonic crystals in InP: Sidewall passivation
Conference paper (2005) -
R van der Heijden (author)
,
CF Carlstrom (author)
,
E.W.J.M. van der Drift (author)
,
RW van der Heijden (author)
,
R Notzel (author)
,
R Veldhoven (author)
,
F Karouta (author)
,
H.W.M. Salemink (author)
,
A Talneau (author)
