MEMS-based lineair thermopile detector arrays for ir microspectrometers

A surface micromachined thermopile detector array with an interference-based absorber

A model for static and dynamic thermal analysis of thin film MEMS structures including the thermal conductivity of the surrounding gas

IR microspectrometers based on linear-variable optical filters

Design and fabrication of an Albedon insensitive analog sun sensor

Surface micromached gas sensor using thermopiles for carbon dioxide detection

A CMOS 128 APS linear array integrated with a LVOF for high sensitivity and high resolution micro spectrophotometry

Fabrication and characterization of IC compatible linear variable optical filters with application in a micro spectrometer

Vertically tapered layers for optical applications fabricated using resist reflow

Characterization of thermal cross-talk in a MEMS-based thermopile detector array

Study of thermal cross-talk in micromachined thermopile based infrared detector arrays

Interference filter based IR absorber for MEMS thermopile array

Microspectrometer with a concave grating fabricated in a MEMS technology

IC-compatible fabrication of linear variable optical filters for micro-spectrometer

Self-powered sun sensor microsystems

Self-powered optical sensor systems

Thermal cross-talk in IC-compatible micromachined infrared thermopile detector arrays

Planar MEMS-compatible microspectrograph

Design and fabrication of a thermopile detector array with scaled elements for an integrated IR microspectrometer

A thermopile detector array with scaled TE elements for use in an integrated IR microspectrometer