CMOS compatible LVOF based visible microspectrometer

Spectral measurement with a linear variable filter using a LMS algorithm

Optical microspectrometers using imaging diffraction gratings

An UV linear variable optical filter based micro spectrometer

Fabrication and characterization of IC compatible linear variable optical filters with application in a micro spectrometer

Spectral measurement using IC compatible linear variable optical filter

Study of thermal cross-talk in micromachined thermopile based infrared detector arrays

Characterization of thermal cross-talk in a MEMS-based thermopile detector array

Thermal cross-talk in IC-compatible micromachined infrared thermopile detector arrays

Interference filter based IR absorber for MEMS thermopile array

Vertically tapered layers for optical applications fabricated using resist reflow

Microspectrometer with a concave grating fabricated in a MEMS technology

IC-compatible fabrication of linear variable optical filters for micro-spectrometer

Optical microspectrometer with planar grating and external spherical

Cross-talk characterization of thermal detector array

Simulation and analytical calculation of reflowed resist structures

High-resolution microspectrometer with an aberration-correcting planar grating

Characterization of thermal cross-talk in a thermopile detector

Concave diffraction gratings fabricated with planar lithography

Optimal implementation of a microspectrometer based on a single flat diffraction grating