Microspectrometer with a concave grating fabricated in a MEMS technology

Conference paper (2009)

Authors

S Grabarnik Electronic Instrumentation
A. Emadi Electronic Instrumentation
H.W. Wu Electronic Instrumentation
G. Graaf Electronic Instrumentation
Reinoud Wolfenbuttel Electronic Instrumentation
Research Group
Electronic Instrumentation
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Published Date

2009

Language

Undefined/Unknown

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Research Group

Electronic Instrumentation

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