Fabrication and characterization of IC compatible linear variable optical filters with application in a micro spectrometer

Emadi, A.; Wu, H.W.; Grabarnik, S; de Graaf, G.; Hedsten, K; Enoksson, P; Correia, J.H.G.; Wolffenbuttel, R.F.

Fabrication and characterization of IC compatible linear variable optical filters with application in a micro spectrometer

Journal article (2010)

Authors

A. Emadi Electronic Instrumentation -

H.W. Wu Electronic Instrumentation -

S Grabarnik Electronic Instrumentation -

G. de Graaf Electronic Instrumentation -

K Hedsten External organisation

P Enoksson External organisation

J.H.G. Correia Electronic Instrumentation -

R.F. Wolffenbuttel Electronic Instrumentation -

Research Group

Electronic Instrumentation () (TU Delft)

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Published Date

2010

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation