Fabrication and characterization of IC compatible linear variable optical filters with application in a micro spectrometer

Optical microspectrometers using imaging diffraction gratings

An UV linear variable optical filter based micro spectrometer

CMOS compatible LVOF based visible microspectrometer

Spectral measurement with a linear variable filter using a LMS algorithm

Spectral measurement using IC compatible linear variable optical filter

IC-compatible fabrication of linear variable optical filters for micro-spectrometer

Microspectrometer with a concave grating fabricated in a MEMS technology

Interference filter based IR absorber for MEMS thermopile array

Thermal cross-talk in IC-compatible micromachined infrared thermopile detector arrays

Study of thermal cross-talk in micromachined thermopile based infrared detector arrays

Characterization of thermal cross-talk in a MEMS-based thermopile detector array

Vertically tapered layers for optical applications fabricated using resist reflow

Optical microspectrometer with planar grating and external spherical

Fabrication of an imaging diffraction grating for use in a MEMS-based optical microspectrograph

IC-compatible microspectrometer using a planar imaging diffraction grating

Design and fabrication of a thermopile detector array with scaled elements for an integrated IR microspectrometer

A thermopile detector array with scaled TE elements for use in an integrated IR microspectrometer

Characterization of thermal cross-talk in a thermopile detector

Optimal implementation of a microspectrometer based on a single flat diffraction grating