A model for static and dynamic thermal analysis of thin film MEMS structures including the thermal conductivity of the surrounding gas

Conference paper (2011)

Authors

G. de Graaf Electronic Instrumentation - EEMCS
H.W. Wu Electronic Instrumentation - EEMCS
R.F. Wolffenbuttel Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2011

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation