EJ Geluk | TU Delft Repository

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EJ Geluk

Conference paper (4)

4 records found

1

Cl2-based inductively coupled plasma etching of photonic crystals in InP,

Conference paper (2004) - RW van der Heijden (author) , CF Carlström (author) , MSP Andriesse (author) , E.W.J.M. van der Drift (author) , EJ Geluk (author) , F Karouta (author) , P Nouwens (author) , YS Oei (author) , T de Vries (author) , H.W.M. Salemink (author)

Deep dry etching process development for photonic crystals in InP-based planar waveguides

Conference paper (2004) - RW van der Heijden (author) , MSP Andriesse (author) , CF Carlström (author) , E.W.J.M. van der Drift (author) , EJ Geluk (author) , F Karouta (author) , P Nouwens (author) , YS Oei (author) , T de Vries (author) , H.W.M. Salemink (author)

Deep dry etching process development for InP-based photonic crystals

Conference paper (2003) - R van der Heijden (author) , EWJM van der Drift (author) , EJ Geluk (author) , RW van der Heijden (author) , F Karouta (author) , PAM Nouwens (author) , YS Oei (author) , T de Vries (author) , HWM Salemink (author)

Polarization based Integration Scheme (POLIS) for Active and Passive Components

Conference paper (2003) - U Khalique (author) , Y Zhu (author) , JJGM van der Tol (author) , FH Groen (author) , F Karouta (author) , EJ Geluk (author) , MK Smit (author)