P Nouwens | TU Delft Repository

PN

P Nouwens

Conference paper (2)

2 records found

1

Cl2-based inductively coupled plasma etching of photonic crystals in InP,

Conference paper (2004) - RW van der Heijden (author) , CF Carlström (author) , MSP Andriesse (author) , E.W.J.M. van der Drift (author) , EJ Geluk (author) , F Karouta (author) , P Nouwens (author) , YS Oei (author) , T de Vries (author) , H.W.M. Salemink (author)

Deep dry etching process development for photonic crystals in InP-based planar waveguides

Conference paper (2004) - RW van der Heijden (author) , MSP Andriesse (author) , CF Carlström (author) , E.W.J.M. van der Drift (author) , EJ Geluk (author) , F Karouta (author) , P Nouwens (author) , YS Oei (author) , T de Vries (author) , H.W.M. Salemink (author)