CF Carlström | TU Delft Repository

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CF Carlström

Conference paper (2)

2 records found

1

Cl2-based inductively coupled plasma etching of photonic crystals in InP,

Conference paper (2004) - RW van der Heijden (author), CF Carlström (author), MSP Andriesse (author), E.W.J.M. van der Drift (author), EJ Geluk (author), F Karouta (author), P Nouwens (author), YS Oei (author), T de Vries (author), H.W.M. Salemink (author)

Deep dry etching process development for photonic crystals in InP-based planar waveguides

Conference paper (2004) - RW van der Heijden (author), MSP Andriesse (author), CF Carlström (author), E.W.J.M. van der Drift (author), EJ Geluk (author), F Karouta (author), P Nouwens (author), YS Oei (author), T de Vries (author), H.W.M. Salemink (author)